II Workshop s-Braxin on New technologies in X-Ray Imaging

M. Sc. Vitor Vlnieska

Contact: vitor.vlnieska@kit.edu

Research Topics: Polymer Science, Lithography, X-ray Optics, Grating based imaging

 

Vitor Vlnieska has a permanent position at Federal University of Paraná (UFPR) – Brazil, since 2011, where he worked with polymers and polymer synthesis since 2009. From 2014 to 2016 he was professor at Opet College - Brazil, teaching for engineering courses.He obtained the Master degree in Organic Chemistry from UFPR in 2013. He has graduation in Chemistry (UFPR) as bachelor and Teaching license and Industrial Automation Technologist (UTFPR). He is currently a PhD student at Institute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), Germany. His thesis focuses on the polymer composition of resists and on possibilities for improvements that can be implemented to increase the limits of gratings manufactured by lithography process.

Contribution: High aspect ratio grating patterning by deep X-ray lithography

Computed X-ray phase contrast imaging based on Talbot-Lau interferometry is a valuable tool for medical diagnostics and non-destructive analysis of materials. The one dimensional high aspect ratio (HAR) gratings are the most important optical component of this technique. Three gratings are inserted in the standard radiography setup consisting of an X-ray source, the object to be investigated and the detector. These gratings are manufactured by X-ray lithography followed by gold electroplating, known as LIGA process (german acronym for “Lithographie, Galvanoformung, Abformung”). Usually the gratings are requested in heights above 100 μm and periods in the micrometer range, with areas larger than 50 mm x 50 mm. In this presentation we will describe the lithography process followed by gold electroplating and discuss the main challenges to fabricated the gratings for Talbot-Lau interferometric imaging. Besides the gratings also some examples of other micro structured HAR components which are of interest for industrial application will be presented.